Low-loss silicon rectangular waveguides fabricated by anisotoropic wet etching for roughness reduction (2015)
Attributed to:
Manufacturing Quantum Nano-LEGO Blocks for Electronics, Photonics, and Phononics Integrated Systems
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/group4.2015.7305962
Publication URI: http://dx.doi.org/10.1109/group4.2015.7305962
Type: Conference/Paper/Proceeding/Abstract