Scaling/LER study of Si GAA nanowire FET using 3D Finite Element Monte Carlo simulations (2016)

First Author: Elmessary M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/ulis.2016.7440050

Publication URI: http://dx.doi.org/10.1109/ulis.2016.7440050

Type: Conference/Paper/Proceeding/Abstract