Scaling/LER study of Si GAA nanowire FET using 3D finite element Monte Carlo simulations (2017)

First Author: Elmessary M
Attributed to:  Modelling of Carrier Transport in Ultra Thin Body Transistors funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.sse.2016.10.018

Publication URI: http://dx.doi.org/10.1016/j.sse.2016.10.018

Type: Journal Article/Review

Parent Publication: Solid-State Electronics

ISSN: 00381101