Correlation and convolution filtering and image processing for pitch evaluation of 2D micro- and nano-scale gratings and lattices. (2017)
Attributed to:
EPSRC Centre for Innovative Manufacturing in Advanced Metrology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1364/ao.56.002434
PubMed Identifier: 28375349
Publication URI: http://europepmc.org/abstract/MED/28375349
Type: Journal Article/Review
Volume: 56
Parent Publication: Applied optics
Issue: 9
ISSN: 1559-128X