High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface. (2017)

First Author: Ekberg P
Attributed to:  Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/oe.25.018703

PubMed Identifier: 29041065

Publication URI: http://europepmc.org/abstract/MED/29041065

Type: Journal Article/Review

Volume: 25

Parent Publication: Optics express

Issue: 16

ISSN: 1094-4087