Tailored voltage waveform capacitively coupled plasmas in electronegative gases: frequency dependence of asymmetry effects (2016)
Attributed to:
Interactions between micro-plasma devices
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0022-3727/49/26/265203
Publication URI: http://dx.doi.org/10.1088/0022-3727/49/26/265203
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 26