Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition (2017)

First Author: Linzen S
Attributed to:  Quantum technology capital: UK Superconducting Quantum Technologies funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6668/aa572a

Publication URI: http://dx.doi.org/10.1088/1361-6668/aa572a

Type: Journal Article/Review

Parent Publication: Superconductor Science and Technology

Issue: 3

ISSN: 0953-2048