Trimming of silicon-on-insulator devices via localised laser annealing (Conference Presentation) (2019)

First Author: Biryukova V

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2507212

Publication URI: http://dx.doi.org/10.1117/12.2507212

Type: Conference/Paper/Proceeding/Abstract