Electron transport mechanism through ultrathin Al 2 O 3 films grown at low temperatures using atomic-layer deposition (2019)

First Author: Ma P

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6641/ab315d

Publication URI: http://dx.doi.org/10.1088/1361-6641/ab315d

Type: Journal Article/Review

Parent Publication: Semiconductor Science and Technology

Issue: 10