Piezoelectric ZnO thin films for 2DOF MEMS vibrational energy harvesting (2019)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.surfcoat.2018.11.102

Publication URI: http://dx.doi.org/10.1016/j.surfcoat.2018.11.102

Type: Journal Article/Review

Parent Publication: Surface and Coatings Technology