Thermal Degradation of Electroplated Nickel Thermal Microactuators (2009)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2009.2034394

Publication URI: http://dx.doi.org/10.1109/jmems.2009.2034394

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 6