Investigating the formation of isotopically pure layers for quantum computers using ion implantation and layer exchange (2019)
Attributed to:
Integrated Plasma Source Focused Ion Beam with Scanning Electron Microscope
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.nimb.2019.09.013
Publication URI: http://dx.doi.org/10.1016/j.nimb.2019.09.013
Type: Journal Article/Review
Parent Publication: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms