Two-dimensional remote interferometric stage encoder through a single access port using range-resolved interferometry (2019)
Attributed to:
A new approach for highly accurate optical interferometry measurements in nanotechnology
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1117/12.2525596
Publication URI: http://dx.doi.org/10.1117/12.2525596
Type: Conference/Paper/Proceeding/Abstract