Diamond Etching Beyond 10 µm with Near-Zero Micromasking. (2019)
Attributed to:
Delta-doped diamond structures for high performance electronic devices
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1038/s41598-019-51970-8
PubMed Identifier: 31666585
Publication URI: http://europepmc.org/abstract/MED/31666585
Type: Journal Article/Review
Volume: 9
Parent Publication: Scientific reports
Issue: 1
ISSN: 2045-2322