Acoustofluidics Along Inclined Surfaces Based on AlN/Si Surface Acoustic Wave Devices (2020)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/mems46641.2020.9056176

Publication URI: http://dx.doi.org/10.1109/mems46641.2020.9056176

Type: Conference/Paper/Proceeding/Abstract