MEMS/NEMS based on mono-, nano-, and ultrananocrystalline diamond films (2014)

First Author: Sumant A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1557/mrs.2014.98

Publication URI: http://dx.doi.org/10.1557/mrs.2014.98

Type: Journal Article/Review

Parent Publication: MRS Bulletin

Issue: 6