Development of a flexure-based nano-actuator for high-frequency high-resolution directional sensing with atomic force microscopy. (2021)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1063/5.0057032

PubMed Identifier: 34598531

Publication URI: http://europepmc.org/abstract/MED/34598531

Type: Journal Article/Review

Volume: 92

Parent Publication: The Review of scientific instruments

Issue: 9

ISSN: 0034-6748