Progress in atomic layer deposited [alpha]-Ga2O3 materials and solar-blind detectors (2021)

First Author: Massabuau F
Attributed to:  Manufacturing with Light 2: photochemical ALD to manufacture functional thin films funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2588729

Publication URI: http://dx.doi.org/10.1117/12.2588729

Type: Conference/Paper/Proceeding/Abstract