Atomic insights into the oxygen incorporation in atomic layer deposited conductive nitrides and its mitigation by energetic ions. (2021)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1039/d0nr08921d
PubMed Identifier: 34052842
Publication URI: http://europepmc.org/abstract/MED/34052842
Type: Journal Article/Review
Volume: 13
Parent Publication: Nanoscale
Issue: 22
ISSN: 2040-3364