Flexible thin-film acoustic wave devices with off-axis bending characteristics for multisensing applications. (2021)

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1038/s41378-021-00325-3

PubMed Identifier: 34900331

Publication URI: http://europepmc.org/abstract/MED/34900331

Type: Journal Article/Review

Volume: 7

Parent Publication: Microsystems & nanoengineering

ISSN: 2055-7434