On-Chip Frequency Tuning of Fast Resonant MEMS Scanner (2022)
Attributed to:
MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2022.3201381
Publication URI: http://dx.doi.org/10.1109/jmems.2022.3201381
Type: Journal Article/Review
Parent Publication: Journal of Microelectromechanical Systems
Issue: 6