Stress-Assisted Thermal Diffusion Barrier Breakdown in Ion Beam Deposited Cu/W Nano-Multilayers on Si Substrate Observed by in Situ GISAXS and Transmission EDX. (2021)
Attributed to:
XMaS: The UK Materials Science Facility at the ESRF
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acsami.0c19173
PubMed Identifier: 33507755
Publication URI: http://europepmc.org/abstract/MED/33507755
Type: Journal Article/Review
Volume: 13
Parent Publication: ACS applied materials & interfaces
Issue: 5
ISSN: 1944-8244