Real-time monitoring of plasma synthesis of functional materials by high power impulse magnetron sputtering and other PVD processes: towards a physics-constrained digital twin (2022)
Abstract
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Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/aca25a
Publication URI: http://dx.doi.org/10.1088/1361-6463/aca25a
Type: Journal Article/Review
Parent Publication: Journal of Physics D: Applied Physics
Issue: 3