High-Throughput Area-Selective Spatial Atomic Layer Deposition of SiO 2 with Interleaved Small Molecule Inhibitors and Integrated Back-Etch Correction for Low Defectivity (2023)

First Author: Karasulu B

Attributed to: Exploring All-Solid-State Batteries using First-Principles Modelling: Effective Computational Strategies towards Better Batteries funded by EPSRC

No abstract provided

Type: Journal Article/Review

Parent Publication: Advanced Materials

Issue: 25