Two-dimensional remote interferometric stage encoder through a single access port using range-resolved interferometry (2019)

First Author: Wiseman K
Attributed to:  Engineering Photonics: Sensor and Instrumentation Development and Application funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2525596

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85076697874

Type: Conference/Paper/Proceeding/Abstract