Defect growth in multilayer chromium nitride/niobium nitride coatings produced by combined high power impulse magnetron sputtering and unbalance magnetron sputtering technique (2017)

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2017.06.027

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85021704878

Type: Journal Article/Review

Parent Publication: Thin Solid Films