Modeling of interference microscopy beyond the linear regime (2020)

First Author: Thomas M
Attributed to:  Metrology for precision and additive manufacturing funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/1.oe.59.3.034110

Publication URI: https://api.elsevier.com/content/abstract/scopus_id/85082998241

Type: Journal Article/Review

Parent Publication: Optical Engineering

Issue: 03