Three-Dimensional Simulation Platform for Optimal Designs of the MEMS Microphone (2022)
Attributed to:
Thin Film Acoustic Wave Platform for Conformable and Mechanically Flexible Biosensors
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.3389/fmats.2022.959480
Publication URI: http://dx.doi.org/10.3389/fmats.2022.959480
Type: Journal Article/Review
Parent Publication: Frontiers in Materials