Vibration compensating beam scanning interferometer for surface measurement. (2008)

First Author: Martin H
Attributed to:  A chip device for on-line assessment in nano-scale surface manufacture funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1364/ao.47.000888

PubMed Identifier: 18311259

Publication URI: http://europepmc.org/abstract/MED/18311259

Type: Journal Article/Review

Volume: 47

Parent Publication: Applied optics

Issue: 7

ISSN: 1559-128X