Effects of ultraviolet exposure on silicon nitride and its application in tuning passive photonic devices (2023)

First Author: De Paoli G

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/12.2647364

Publication URI: http://dx.doi.org/10.1117/12.2647364

Type: Conference/Paper/Proceeding/Abstract