High-uniformity atomic layer deposition of superconducting niobium nitride thin films for quantum photonic integration (2023)

First Author: Lennon C
Attributed to:  Quantum-Enhanced Interferometry for New Physics funded by SPF

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2633-4356/ad0aa5

Publication URI: http://dx.doi.org/10.1088/2633-4356/ad0aa5

Type: Journal Article/Review

Parent Publication: Materials for Quantum Technology

Issue: 4