Plasma etching for fabrication of complex nanophotonic lasers from bonded InP semiconductor layers (2023)
Attributed to:
Semiconductor lasers on a graph
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1016/j.mne.2023.100196
Publication URI: http://dx.doi.org/10.1016/j.mne.2023.100196
Type: Journal Article/Review
Parent Publication: Micro and Nano Engineering