High-Quality Amorphous Silicon Carbide for Hybrid Photonic Integration Deposited at a Low Temperature (2023)
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1021/acsphotonics.3c00968
Publication URI: http://dx.doi.org/10.1021/acsphotonics.3c00968
Type: Journal Article/Review
Parent Publication: ACS Photonics
Issue: 10
ISSN: 2330-4022