Confining Liquids on Silicon Surfaces to Lubricate MEMS (2015)

First Author: Leong J

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1007/s11249-015-0541-2

Publication URI: http://dx.doi.org/10.1007/s11249-015-0541-2

Type: Journal Article/Review

Parent Publication: Tribology Letters

Issue: 1