Analysis and characterisation of a kinematically decoupled compliant XY stage (2015)

First Author: Herpe X

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/iconac.2015.7313988

Publication URI: http://dx.doi.org/10.1109/iconac.2015.7313988

Type: Conference/Paper/Proceeding/Abstract