Impact of thermal oxidation uniformity on 150 mm GaAs- and Ge-substrate VCSELs (2023)

First Author: Gillgrass S
Attributed to:  Compound Semiconductor Underpinning Equipment funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/1361-6463/acc040

Publication URI: http://dx.doi.org/10.1088/1361-6463/acc040

Type: Journal Article/Review

Parent Publication: Journal of Physics D: Applied Physics

Issue: 15

ISSN: 13616463 00223727