On-chip frequency tuning of fast resonant MEMS scanner (2022)
Attributed to:
MEMS-enabled miniaturised multimodal microscopy through pulsed structured illumination
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.48550/arxiv.2206.06785
Publication URI: https://arxiv.org/abs/2206.06785
Type: Preprint