High Temporal Resolution Ion Energy Distribution Functions in HIPIMS Discharges (2009)

First Author: Mishra A

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1002/ppap.200931601

Publication URI: http://dx.doi.org/10.1002/ppap.200931601

Type: Journal Article/Review

Parent Publication: Plasma Processes and Polymers

Issue: S1