Low temperature remote plasma sputtering of indium tin oxide for flexible display applications (2009)

First Author: Wakeham S

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2009.04.072

Publication URI: http://dx.doi.org/10.1016/j.tsf.2009.04.072

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 4