Spatial and temporal investigation of high power pulsed magnetron discharges by optical 2D-imaging (2010)

First Author: Liebig B
Attributed to:  Dual Source Pulsed Plasmas for the Production of Ultra-High Performance Coatings funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1016/j.tsf.2010.06.055

Publication URI: http://dx.doi.org/10.1016/j.tsf.2010.06.055

Type: Journal Article/Review

Parent Publication: Thin Solid Films

Issue: 5