The role of carbon contamination in voltage linearity and leakage current in high-k metal-insulator-metal capacitors (2008)
Attributed to:
Technologies for SiC electronics and sensors in extreme environments
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1063/1.2973687
Publication URI: http://dx.doi.org/10.1063/1.2973687
Type: Journal Article/Review
Parent Publication: Journal of Applied Physics
Issue: 5