Piezoelectric actuated micro-resonators based on the growth of diamond on aluminum nitride thin films. (2013)

First Author: Hees J
Attributed to:  Nanocrystalline diamond for Micro-Electro-Mechanical Systems (MEMS) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0957-4484/24/2/025601

PubMed Identifier: 23220817

Publication URI: http://europepmc.org/abstract/MED/23220817

Type: Journal Article/Review

Volume: 24

Parent Publication: Nanotechnology

Issue: 2

ISSN: 0957-4484