Force feedback linearization for higher-order electromechanical sigma-delta modulators (2006)
Attributed to:
Advanced and Intelligent Interface Circuits for Capacitive MEMS Sensors - The E and S in MEMS
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/16/6/s09
Publication URI: http://dx.doi.org/10.1088/0960-1317/16/6/s09
Type: Journal Article/Review
Parent Publication: Journal of Micromechanics and Microengineering
Issue: 6