Fabrication of MEMS components using ultrafine-grained aluminium alloys (2010)

First Author: Qiao X
Attributed to:  MEMS COMPONENTS FORMED FROM NANOSTRUCTURAL METALS funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/0960-1317/20/4/045029

Publication URI: http://dx.doi.org/10.1088/0960-1317/20/4/045029

Type: Journal Article/Review

Parent Publication: Journal of Micromechanics and Microengineering

Issue: 4