Surface profile measurement using spatially dispersed short coherence interferometry (2014)

First Author: Hassan M

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1088/2051-672x/2/2/024001

Publication URI: http://dx.doi.org/10.1088/2051-672x/2/2/024001

Type: Journal Article/Review

Parent Publication: Surface Topography: Metrology and Properties

Issue: 2