Wafer-Level Transfer Technologies for PZT-Based RF MEMS Switches (2010)

First Author: Guerre R
Attributed to:  Integrated Functional Materials for System-in-Package Applications funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1109/jmems.2010.2047005

Publication URI: http://dx.doi.org/10.1109/jmems.2010.2047005

Type: Journal Article/Review

Parent Publication: Journal of Microelectromechanical Systems

Issue: 3