Leakage current and charge trapping behavior in TiO2/SiO2 high-? gate dielectric stack on 4H-SiC substrate (2007)
Attributed to:
Technologies for SiC electronics and sensors in extreme environments
funded by
EPSRC
Abstract
No abstract provided
Bibliographic Information
Digital Object Identifier: http://dx.doi.org/10.1116/1.2433976
Publication URI: http://dx.doi.org/10.1116/1.2433976
Type: Journal Article/Review
Parent Publication: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
Issue: 1