Low frequency tantalum electromechanical systems for biomimetical applications (2011)

First Author: Latif R
Attributed to:  A multichannel adaptive integrated MEMS/CMOS microphone funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1116/1.3662408

Publication URI: http://dx.doi.org/10.1116/1.3662408

Type: Journal Article/Review

Parent Publication: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena

Issue: 6