Photolithographic patterning of bihelical tracks onto conical substrates (2007)

First Author: Purvis A

Attributed to: Maskless Non-Planar Photolithography (3DML) funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1117/1.2824377

Publication URI: http://dx.doi.org/10.1117/1.2824377

Type: Journal Article/Review

Parent Publication: Journal of Micro/Nanolithography, MEMS, and MOEMS

Issue: 4