XTEM characterization of modulated ion implantation through self-organized anodic aluminum oxide (AAO) membranes (2012)

First Author: Guan W
Attributed to:  Nanoparticle and Element Distribution Studies of Ion Implantation Processes funded by EPSRC

Abstract

No abstract provided

Bibliographic Information

Digital Object Identifier: http://dx.doi.org/10.1557/opl.2012.757

Publication URI: http://dx.doi.org/10.1557/opl.2012.757

Type: Journal Article/Review

Parent Publication: MRS Proceedings